ANODIC OXIDATION OF GaAs IN THE OXYGEN PLASMA OF THE HF DISCHARGE

Bibliographic Details
Main Authors: Pinčík, Emil (Author), Thurzo, Ilja, 1944- (Author), Bartoš, J. (Author), Dillinger, Juraj, 1940- (Author), Kútik, P. (Author)
Format: Article
Language:Slovak
English