Skip to content
Book Bag:
0
items
(Full)
Login
Language
English
Slovak
Catalog
Catalog Books
Articles
Catalog ONDV
Catalog OND
All Fields
Title
Author
Subject
Call Number
ISBN/ISSN
Find
Advanced
PLASMA ETCHING OF POLYSILICON...
Cite this
Print
Export Record
Export to MARC
Export to BibTeX
Export to Jednoduchý textový výpis
Export to ISBD (text)
Export to Citácia ISO 690 (HTML)
Export to Citácia ISO 690 (.doc)
Add to Book Bag
Remove from Book Bag
Permanent link
PLASMA ETCHING OF POLYSILICON AND SILICON DIOXIDE IN A PARALLEL-PLATE REACTOR
Bibliographic Details
Main Author:
Mikuš, O.
(Author)
Format:
Article
Language:
Slovak
English
Pozri predplatné
Predplatné
Kliknite na „Pozri predplatné“.
Holdings
Description
Similar Items
Staff View
Similar Items
Plasma etching of silicon and its compounds in the freon plasma
by: Jankuj, Jiří
SILICON SURFACE PLASMA ETCHING OPTIMIZATION IN VIEW OF THE RADIATION DEFECT FORMATION
by: Abramov, A., et al.
SILICON/SILICON DIOXIDE NANOSTRUCTURE IN ELECTROSTATIC FIELD
by: Grmela, Lubomir, et al.
Time development of the shock wave in the plasma parallel plate accelerator
by: Píchal, J.
PREDICTION OF THE PLASMA REACTOR EFFICIENCY
by: Rezstak, A.
