Mikuš, O. PLASMA ETCHING OF POLYSILICON AND SILICON DIOXIDE IN A PARALLEL-PLATE REACTOR.
Chicago Style (17th ed.) CitationMikuš, O. PLASMA ETCHING OF POLYSILICON AND SILICON DIOXIDE IN A PARALLEL-PLATE REACTOR.
MLA (9th ed.) CitationMikuš, O. PLASMA ETCHING OF POLYSILICON AND SILICON DIOXIDE IN A PARALLEL-PLATE REACTOR.
Warning: These citations may not always be 100% accurate.
