INVESTIGATIONS ON THE ENERGY INFLUX AT PLASMA SURFACE PROCESSES

Bibliographic Details
Main Authors:	Kersten, H. (Author), Rohde, D. (Author), Deutsch, H. (Author), Hippler, R. (Author), Stoffels, W. W. (Author), Stoffels, E. (Author), Kroesen, G. M. W. (Author), Berndt, J. (Author)
Format:	Article
Language:	Slovak English

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