ELECTRICAL BEHAVIOUR OF SPUTTERED Al/SiGe/Si STRUCTURES

Bibliographic Details
Main Authors:	Horváth, Zs. J. (Author), Serényi, M. (Author), Ádám, M. (Author), Szabó, I. (Author), Rakovics, V. (Author), Turmezei, P. (Author), Zolnai, Z. (Author), Khan, N. Q. (Author)
Format:	Article
Language:	Slovak English

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