The simulation of the squeeze film damping effect in MEMS-based optical switch

Bibliographic Details
Main Authors:	Plander, Ivan, 1928-2019 (Author), Štepanovský, Michal (Author)
Format:	Article
Language:	English
Subjects:	mikroelektromechanické systémy optické prepínače zrkadlá Reynoldsova rovnica počítačová simulácia štúdie

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