NSOM LITHOGRAPHY AS A PROMISING TECHNIQUE FOR SUBMICROMETER STRUCTURES FABRICATION

Bibliographic Details
Main Authors:	Kubicová, Ivana (Author), Pudiš, Dušan, 1974- (Author), Šušlik, Ľuboš (Author), Škriniarová, Jaroslava (Author)
Format:	Article
Language:	English

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