Strong dependence of electron kinetics in collision dominated He-CO rf plazma on different admixtures of CO

Bibliographic Details
Main Authors:	Winkler, R. (Author), Wilhelm, J. (Author), Dilonardo, M. (Author), Capitelli, M. (Author), Gorsc, C. (Author)
Format:	Article
Language:	English
Subjects:	héliová plazma elektrické výboje elektróny energia kinetická rovnice Boltzmanove články z novín a časopisov

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