Plasma-deposited silicon nitride films in HMDS (hexamethyldisilazane) vapours
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | Slovak English |
| PhysicalDescription: | Obr. 1. Grafy 3. Res. rus., lit. 10 zázn. v angl., ruš. |
| Subjects: |
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