Emission spectroscopy investigation of a RF-CCl4-plasma in a planar etch reactor ; J. Meichsner, J. Trnovec, V. Martišovitš, P. Lukáč, H. W. Poll

Bibliographic Details
Main Authors:	Meichsner, J. (Author), Trnovec, J. (Author), Martišovitš, Viktor, 1939- (Author), Lukáč, P. (Author), Poll, H. W. (Author)
Format:	Article
Language:	English Slovak
Subjects:	reaktor planárny leptací vysokofrekvenčná plazma spektroskopia emisná články zo zborníkov

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