Chemical Etching of InGaP and GaAs in Solutions of HCl, H3PO4 and H2O2

Bibliographic Details
Main Authors:	Škriniarová, Jaroslava (Author), Kováč, Jaroslav, 1947- (Author), Breza, Juraj, 1951- (Author), Gregušová, Dagmar, 1958- (Author)
Format:	Article
Language:	Slovak English
Subjects:	polovodiče InGaP polovodiče GaAs chemické leptanie články z novín a časopisov

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