Chemical Etching of InGaP and GaAs in Solutions of HCl, H3PO4 and H2O2

Bibliographic Details
Main Authors: Škriniarová, Jaroslava (Author), Kováč, Jaroslav, 1947- (Author), Breza, Juraj, 1951- (Author), Gregušová, Dagmar, 1958- (Author)
Format: Article
Language:Slovak
English
Subjects:
Description
Item Description:Životopisné údaje
Physical Description:Obr. 5, lit. 7 zázn. v angl.
ISSN:0013-578X