Preparation of bevels on GaAs-based structures by wet chemical etching

Bibliographic Details
Main Authors:	Srnánek, Rudolf, 1944- (Author), Novotný, Ivan, 1950- (Author), Pudiš, Dušan, 1974- (Author)
Format:	Article
Language:	Slovak English
Subjects:	polovodiče chemické leptanie články z novín a časopisov

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