Submicrometer scale photoassisted wet etching of n-doped gallium nitride

Bibliographic Details
Main Authors:	Škriniarová, Jaroslava (Author), Kordoš, Peter, 1939- (Author), Bochem, Hans-Peter (Author), Hart, Andre van der (Author), Steffen, Alfred (Author), Lüth, Hans (Author)
Format:	Article
Language:	Slovak English
Subjects:	nitrid gália fotoelektrochemické leptanie články z novín a časopisov

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