Wet chemical etching of AlGaAs/GaAs heterostructures controlled by optical in-situ monitoring

Bibliographic Details
Main Authors:	Waclawek, Ján (Author), Krausko, Gabriel (Author), Škriniarová, Jaroslava (Author)
Format:	Article
Language:	Slovak English
Subjects:	polovodiče chemické leptanie monitorovanie optické in-situ články z novín a časopisov

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