Wet chemical etching of AlGaAs/GaAs heterostructures controlled by optical in-situ monitoring
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | Slovak English |
| PhysicalDescription: | Obr. |
| ISSN: | 0013-578X |
| Subjects: |
Similar Items
Preparation of bevels on GaAs-based structures by wet chemical etching
by: Srnánek, Rudolf, 1944-, et al.
by: Srnánek, Rudolf, 1944-, et al.
Chemical Etching of InGaP and GaAs in Solutions of HCl, H3PO4 and H2O2
by: Škriniarová, Jaroslava, et al.
by: Škriniarová, Jaroslava, et al.
Chemické leptanie InGaAsP
by: Srnánek, Rudolf, 1944-, et al.
by: Srnánek, Rudolf, 1944-, et al.
Is Citric acid a Selective Etchant for InGaAs/GaAs?
by: Škriniarová, Jarka, et al.
by: Škriniarová, Jarka, et al.
