Theoretical study of heterogeneous reactions during plasma etching and deposition by mass spectrometry of stable species

Bibliographic Details
Main Authors:	Trnovec, J. (Author), Martišovitš, Viktor, 1939- (Author)
Format:	Article
Language:	Slovak English
Subjects:	plazmové leptanie depozícia plazmová hmotnostná spektrometria články z novín a časopisov

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