On ionization processis Ar-Hexamethyldisiloxane (HMDS) discharge

Bibliographic Details
Main Authors: Schmidt, M. (Author), Maass, M. (Author)
Format: Article
Language:English
PhysicalDescription:Obr. 6. Res. angl., lit. 15 zázn. v angl., nem., ruš.
Subjects:
Description
Physical Description:Obr. 6. Res. angl., lit. 15 zázn. v angl., nem., ruš.