Solid phase recrystallization of thin polycrystalline silicon films implanted with Si+ ions

Bibliographic Details
Main Authors:	Ožvold, Milan, 1941- (Author), Tuchscher, Ľ. (Author), Čičmanec, Pavol, 1933-2018 (Author), Dobročka, Edmund (Author), Hurtová, O. (Author), Kopačková, K. (Author), Vávra, Ivo, 1949- (Author)
Format:	Article
Language:	Slovak English
Subjects:	vrstvy tenké Si rekryštalizácia články z novín a časopisov

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