Atomic Force Microscope Study of SiC Growth on (111) Silicon

Bibliographic Details
Main Authors:	Kromka, Alexander (Author), Vaněk, Oldřich, 1937- (Author), Cimalla, Volker (Author), Pezoldt, Joerg (Author), Eichhorn, G. (Author)
Format:	Article
Language:	Slovak English
Subjects:	karbid kremíka tenké vrstvy technika CVD mikroskopia články z novín a časopisov

Similar Items